Granted Patent
Utility
US 6,686,214 · App. 09/799,494
Method of aligning a photolithographic mask to a crystal plane
Inventors:
Robert Antaki, Riopel Yan, Annie Vachon
Patented Case
View Patent ↗
Granted: Feb 3, 2004
Filed: Mar 7, 2001
Inventors
Robert Antaki
Riopel Yan
Annie Vachon
Assignee (at issue)
DALSA Semiconductor Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.