Granted Patent
Utility
US 6,687,562 · App. 09/733,194
Process monitoring system for lithography lasers
Inventors:
Parthiv Patel, Joseph Conway, Muljadi Tantra, Jeffrey W. Moen, Jason R. Carlesi, Roger Green, Tom A. Watson, Christopher Rowan
Patented Case
View Patent ↗
Granted: Feb 3, 2004
Filed: Dec 8, 2000
Inventors
Parthiv Patel
Joseph Conway
Muljadi Tantra
Jeffrey W. Moen
Jason R. Carlesi
Roger Green
Tom A. Watson
Christopher Rowan
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.