Granted Patent
Utility
US 6,689,211 · App. 09/599,260
Etch stop layer system
Inventors:
Kenneth Chai-en Wu, Eugene A. Fitzgerald, Jeffrey T. Borenstein, Gianna Taraschi
Patented Case
View Patent ↗
Granted: Feb 10, 2004
Filed: Jun 22, 2000
Inventors
Kenneth Chai-en Wu
Eugene A. Fitzgerald
Jeffrey T. Borenstein
Gianna Taraschi
Assignee (at issue)
MASSACHUSETTS INSTITUTE OF TECHNOLOGY
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.