IP Library › Granted Patent US 6,689,215
Granted Patent Utility
US 6,689,215 · App. 10/265,203

Method and apparatus for mitigating cross-contamination between liquid dispensing jets in close proximity to a surface

Inventor: Andrew Nguyen
Patented Case View Patent ↗
Granted: Feb 10, 2004 Filed: Oct 3, 2002
Inventor
Andrew Nguyen
Assignee (at issue)
ASML Holding N.V.

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Quick Facts
Patent No.
US 6,689,215
App. No.
10/265,203
Filed
2002-10-03
Granted
2004-02-10
Kind
B2