Granted Patent
Utility
US 6,689,220 · App. 09/721,162
Plasma enhanced pulsed layer deposition
Inventor:
Tue Nguyen
Patented Case
View Patent ↗
Granted: Feb 10, 2004
Filed: Nov 22, 2000
Inventor
Tue Nguyen
Assignee (at issue)
Simplus Systems Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.