Granted Patent
Utility
US 6,696,220 · App. 09/976,681
Template for room temperature, low pressure micro-and nano-imprint lithography
Inventors:
Todd C. Bailey, Byung-Jin Choi, Matthew E. Colburn, S. Sreenivasan, C. Grant Willson, John Ekerdt
Patented Case
View Patent ↗
Granted: Feb 24, 2004
Filed: Oct 12, 2001
Inventors
Todd C. Bailey
Byung-Jin Choi
Matthew E. Colburn
S. Sreenivasan
C. Grant Willson
John Ekerdt
Assignee (at issue)
BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.