Granted Patent
Utility
US 6,696,222 · App. 09/910,876
Dual damascene process using metal hard mask
Inventors:
Chen-Chiu Hsue, Shyh-Dar Lee
Patented Case
View Patent ↗
Granted: Feb 24, 2004
Filed: Jul 24, 2001
Inventors
Chen-Chiu Hsue
Shyh-Dar Lee
Assignee (at issue)
Silicon Integrated Systems Corp.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.