Granted Patent
Utility
US 6,696,228 · App. 10/274,153
Method and apparatus for removing organic films
Inventors:
Hisashi Muraoka, Rieko Muraoka, Asuka Sato, Mitsuru Endo
Patented Case
View Patent ↗
Granted: Feb 24, 2004
Filed: Oct 21, 2002
Inventors
Hisashi Muraoka
Rieko Muraoka
Asuka Sato
Mitsuru Endo
Assignees (at issue)
UMS CO., LTD.
Nomura Micro Science Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.