Granted Patent
Utility
US 6,696,363 · App. 09/874,330
Method of and apparatus for substrate pre-treatment
Inventors:
Wai Mun Lee, David J. Maloney, Paul Roman, Michael Fury, Ross Hill, Clifford Henderson, Sean Barstow
Patented Case
View Patent ↗
Granted: Feb 24, 2004
Filed: Jun 6, 2001
Inventors
Wai Mun Lee
David J. Maloney
Paul Roman
Michael Fury
Ross Hill
Clifford Henderson
Sean Barstow
Assignee (at issue)
EKC Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.