Granted Patent
Utility
US 6,696,371 · App. 10/163,007
Method for fabricating positionally exact surface-wide membrane masks
Inventors:
Joerg Butschke, Albrecht Ehrmann, Ernst Haugeneder, Florian Letzkus, Reinhard Springer
Patented Case
View Patent ↗
Granted: Feb 24, 2004
Filed: Jun 5, 2002
Inventors
Joerg Butschke
Albrecht Ehrmann
Ernst Haugeneder
Florian Letzkus
Reinhard Springer
Assignees (at issue)
Infineon Technologies AG
IMS-Ionen Mikrofabrikationas Systeme
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.