Granted Patent
Utility
US 6,698,295 · App. 09/541,394
Microstructures comprising silicon nitride layer and thin conductive polysilicon layer
Inventor:
David W. Sherrer
Patented Case
View Patent ↗
Granted: Mar 2, 2004
Filed: Mar 31, 2000
Inventor
David W. Sherrer
Assignee (at issue)
Shipley Company, L.L.C.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.