Granted Patent
Utility
US 6,698,728 · App. 10/149,092
Method and apparatus for delivering precursors to a plurality of epitaxial reactor sites
Inventors:
Megan Ravetz, Graham Williams, Andrew W. Nelson, Roy Trevor Blunt, Howard Williams, Rajesh Odedra
Patented Case
View Patent ↗
Granted: Mar 2, 2004
Filed: Jun 6, 2002
Inventors
Megan Ravetz
Graham Williams
Andrew W. Nelson
Roy Trevor Blunt
Howard Williams
Rajesh Odedra
Assignees (at issue)
Epichem Limited
IQE plc
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.