Granted Patent
Utility
US 6,702,954 · App. 09/692,730
Chemical-mechanical polishing slurry and method
Inventors:
Yie-Shein Her, Ramanathan Srinivasan, Suryadevara V. Babu, Suresh Ramarajan
Patented Case
View Patent ↗
Granted: Mar 9, 2004
Filed: Oct 19, 2000
Inventors
Yie-Shein Her
Ramanathan Srinivasan
Suryadevara V. Babu
Suresh Ramarajan
Assignee (at issue)
Ferro Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.