Granted Patent
Utility
US 6,703,295 · App. 10/405,298
Method and apparatus for self-doping contacts to a semiconductor
Inventors:
Daniel L. Meier, Hubert P. Davis, Ruth A. Garcia, Joyce A. Jessup
Patented Case
View Patent ↗
Granted: Mar 9, 2004
Filed: Apr 1, 2003
Inventors
Daniel L. Meier
Hubert P. Davis
Ruth A. Garcia
Joyce A. Jessup
Assignee (at issue)
EBARA CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.