Granted Patent
Utility
US 6,703,771 · App. 09/876,238
Monochromatic vacuum ultraviolet light source for photolithography applications based on a high-pressure microhollow cathode discharge
Inventors:
Kurt F. Becker, Peter F. Kurunczi, Karl H. Schoenbach
Patented Case
View Patent ↗
Granted: Mar 9, 2004
Filed: Jun 7, 2001
Inventors
Kurt F. Becker
Peter F. Kurunczi
Karl H. Schoenbach
Assignee (at issue)
The Trustees of Stevens Institute of Technology
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.