Granted Patent
Utility
US 6,706,141 · App. 09/625,200
Device to generate excited/ionized particles in a plasma
Inventors:
Heinz Steinhardt, Alexander Gschwandtner, Josef Mathuni
Patented Case
View Patent ↗
Granted: Mar 16, 2004
Filed: Jul 21, 2000
Inventors
Heinz Steinhardt
Alexander Gschwandtner
Josef Mathuni
Assignee (at issue)
R3T GmbH Rapid Reactive Radicals Technology
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.