Granted Patent
Utility
US 6,707,176 · App. 10/099,892
Non-linear actuator suspension for microelectromechanical systems
Inventor:
Murray Steven Rodgers
Patented Case
View Patent ↗
Granted: Mar 16, 2004
Filed: Mar 14, 2002
Inventor
Murray Steven Rodgers
Assignee (at issue)
MEMX, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.