Granted Patent
Utility
US 6,710,888 · App. 09/578,798
Method of measuring dishing
Inventor:
Jaime Poris
Patented Case
View Patent ↗
Granted: Mar 23, 2004
Filed: May 23, 2000
Inventor
Jaime Poris
Assignee (at issue)
Nanometrics Incorporated
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.