Granted Patent
Utility
US 6,714,625 · App. 08/483,731
Lithography device for semiconductor circuit pattern generation
Inventor:
Glenn J. Leedy
Patented Case
View Patent ↗
Granted: Mar 30, 2004
Filed: Jun 7, 1995
Inventor
Glenn J. Leedy
Assignee (at issue)
Elm Technology Corp.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.