Granted Patent
Utility
US 6,717,143 · App. 10/136,692
Beam alignment in a lower column of a scanning electron microscope or the like
Inventors:
Paul J. Duval, Anastasia Tyurina, Neal T. Sullivan
Patented Case
View Patent ↗
Granted: Apr 6, 2004
Filed: Apr 30, 2002
Inventors
Paul J. Duval
Anastasia Tyurina
Neal T. Sullivan
Assignee (at issue)
SCHLUMBERGER TECHNOLOGIES CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.