Granted Patent
Utility
US 6,719,142 · App. 10/197,085
Apparatus and method for measuring static charge on wafers, disks, substrates, masks, and flat panel displays
Inventors:
John Edgar Menear, Lawrence Levit
Patented Case
View Patent ↗
Granted: Apr 13, 2004
Filed: Jul 16, 2002
Inventors
John Edgar Menear
Lawrence Levit
Assignee (at issue)
Ion Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.