Granted Patent
Utility
US 6,722,964 · App. 09/824,644
Polishing apparatus and method
Inventors:
Norio Kimura, Mitsuhiko Shirakashi, Katsuya Okumura, You Ishii, Junji Kunisawa, Hiroyuki Yano
Patented Case
View Patent ↗
Granted: Apr 20, 2004
Filed: Apr 4, 2001
Inventors
Norio Kimura
Mitsuhiko Shirakashi
Katsuya Okumura
You Ishii
Junji Kunisawa
Hiroyuki Yano
Assignees (at issue)
EBARA CORPORATION
Kabushiki Kaisha Toshiba
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.