Granted Patent
Utility
US 6,723,213 · App. 10/083,123
Titanium target assembly for sputtering and method for preparing the same
Inventors:
Yasuo Nakadai, Poong Kim, Weiping Chai, Masahiro Kodera
Patented Case
View Patent ↗
Granted: Apr 20, 2004
Filed: Feb 27, 2002
Inventors
Yasuo Nakadai
Poong Kim
Weiping Chai
Masahiro Kodera
Assignee (at issue)
Vacuum Metallurgical Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.