Granted Patent
Utility
US 6,723,659 · App. 09/995,588
Micromirror unit fabrication method and micromirror unit made by the same
Inventors:
Yoshihiro Mizuno, Satoshi Ueda, Osamu Tsuboi, Ippei Sawaki, Hisao Okuda, Fumio Yamagishi, Norinao Kouma
Patented Case
View Patent ↗
Granted: Apr 20, 2004
Filed: Nov 29, 2001
Inventors
Yoshihiro Mizuno
Satoshi Ueda
Osamu Tsuboi
Ippei Sawaki
Hisao Okuda
Fumio Yamagishi
Norinao Kouma
Assignees (at issue)
Fujitsu Limited
FUJITSU MEDIA DEVICES LIMITED
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.