Granted Patent
Utility
US 6,724,148 · App. 10/355,619
Mechanism for minimizing ion bombardment energy in a plasma chamber
Inventors:
Juan Jose Gonzalez, Andrew Shabalin, Fernando Gustavo Tomasel
Patented Case
View Patent ↗
Granted: Apr 20, 2004
Filed: Jan 31, 2003
Inventors
Juan Jose Gonzalez
Andrew Shabalin
Fernando Gustavo Tomasel
Assignee (at issue)
Advanced Energy Industries, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.