Granted Patent
Utility
US 6,730,245 · App. 09/753,026
Chemical-mechanical planarization slurries and powders and methods for using same
Inventors:
Mark J. Hampden-Smith, Toivo T. Kodas, James Caruso, Daniel J. Skamser, Quint H. Powell
Patented Case
View Patent ↗
Granted: May 4, 2004
Filed: Jan 2, 2001
Inventors
Mark J. Hampden-Smith
Toivo T. Kodas
James Caruso
Daniel J. Skamser
Quint H. Powell
Assignee (at issue)
Superior MicroPowders LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.