Granted Patent
Utility
US 6,730,562 · App. 10/364,819
Method of patterning ferroelectric layers
Inventors:
Manfred Engelhardt, Walter Hartner, Frank Hintermaier, Gunther Schindler, Volker Weinrich
Patented Case
View Patent ↗
Granted: May 4, 2004
Filed: Feb 11, 2003
Inventors
Manfred Engelhardt
Walter Hartner
Frank Hintermaier
Gunther Schindler
Volker Weinrich
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.