Granted Patent
Utility
US 6,731,531 · App. 09/650,553
Carburized silicon gate insulators for integrated circuits
Inventors:
Leonard Forbes, Kie Y. Ahn
Patented Case
View Patent ↗
Granted: May 4, 2004
Filed: Aug 30, 2000
Inventors
Leonard Forbes
Kie Y. Ahn
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.