Granted Patent
Utility
US 6,737,340 · App. 10/176,451
Method and apparatus for self-doping contacts to a semiconductor
Inventors:
Daniel L. Meier, Hubert P. Davis, Ruth A. Garcia, Joyce A. Jessup
Patented Case
View Patent ↗
Granted: May 18, 2004
Filed: Jun 19, 2002
Inventors
Daniel L. Meier
Hubert P. Davis
Ruth A. Garcia
Joyce A. Jessup
Assignee (at issue)
EBARA CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.