Granted Patent
Utility
US 6,738,859 · App. 09/948,697
Method and apparatus for fast aerial image simulation
Inventor:
Armin Liebchen
Patented Case
View Patent ↗
Granted: May 18, 2004
Filed: Sep 10, 2001
Inventor
Armin Liebchen
Assignee (at issue)
ASML Masktools B.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.