Granted Patent
Utility
US 6,740,166 · App. 09/726,977
Thin film deposition apparatus for semiconductor
Inventor:
Won-sung Choi
Patented Case
View Patent ↗
Granted: May 25, 2004
Filed: Nov 30, 2000
Inventor
Won-sung Choi
Assignee (at issue)
IPS Group Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.