Granted Patent
Utility
US 6,741,093 · App. 10/100,437
Method of determining one or more properties of a semiconductor wafer
Inventors:
William Howland, Robert J. Hillard
Patented Case
View Patent ↗
Granted: May 25, 2004
Filed: Mar 18, 2002
Inventors
William Howland
Robert J. Hillard
Assignee (at issue)
Solid State Measurements, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.