Granted Patent
Utility
US 6,744,174 · App. 10/116,415
Frequency sensitivity analysis and optimum design for MEMS resonator
Inventors:
Brad Paden, Rong Liu, Kimberly L. Turner
Patented Case
View Patent ↗
Granted: Jun 1, 2004
Filed: Apr 2, 2002
Inventors
Brad Paden
Rong Liu
Kimberly L. Turner
Assignee (at issue)
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.