IP Library › Granted Patent US 6,746,318
Granted Patent Utility
US 6,746,318 · App. 09/975,450

Workpiece carrier with adjustable pressure zones and barriers

Inventors: Daniel S. Mallery, Sean Scott Logan, James Lee
Patented Case View Patent ↗
Granted: Jun 8, 2004 Filed: Oct 11, 2001
Inventors
Daniel S. Mallery
Sean Scott Logan
James Lee
Assignee (at issue)
SpeedFam-IPEC Corporation

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Quick Facts
Patent No.
US 6,746,318
App. No.
09/975,450
Filed
2001-10-11
Granted
2004-06-08
Kind
B2