Granted Patent
Utility
US 6,746,318 · App. 09/975,450
Workpiece carrier with adjustable pressure zones and barriers
Inventors:
Daniel S. Mallery, Sean Scott Logan, James Lee
Patented Case
View Patent ↗
Granted: Jun 8, 2004
Filed: Oct 11, 2001
Inventors
Daniel S. Mallery
Sean Scott Logan
James Lee
Assignee (at issue)
SpeedFam-IPEC Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.