Granted Patent
Utility
US 6,746,891 · App. 10/290,920
Trilayered beam MEMS device and related methods
Inventors:
Shawn Jay Cunningham, Svetlana Tatic-Lucic
Patented Case
View Patent ↗
Granted: Jun 8, 2004
Filed: Nov 8, 2002
Inventors
Shawn Jay Cunningham
Svetlana Tatic-Lucic
Assignees (at issue)
Turnstone Systems, Inc.
WISPRY, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.