Granted Patent
Utility
US 6,746,957 · App. 09/811,525
Manufacture of semiconductor device with copper wiring
Inventors:
Nobuyuki Ohtsuka, Noriyoshi Shimizu
Patented Case
View Patent ↗
Granted: Jun 8, 2004
Filed: Mar 20, 2001
Inventors
Nobuyuki Ohtsuka
Noriyoshi Shimizu
Assignee (at issue)
Fujitsu Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.