Granted Patent
Utility
US 6,749,488 · App. 10/268,254
Chemical mechanical polishing slurry composition for polishing conductive and non-conductive layers on semiconductor wafers
Inventors:
Anthony M. Pasqualoni, Deepak Mahulikar, Larry LaFollette, Richard Jenkins
Patented Case
View Patent ↗
Granted: Jun 15, 2004
Filed: Oct 9, 2002
Inventors
Anthony M. Pasqualoni
Deepak Mahulikar
Larry LaFollette
Richard Jenkins
Assignee (at issue)
Planar Solutions, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.