Granted Patent
Utility
US 6,750,115 · App. 10/303,462
Method for generating alignment marks for manufacturing MIM capacitors
Inventors:
Xian J. Ning, Keith Kwong Hon Wong
Patented Case
View Patent ↗
Granted: Jun 15, 2004
Filed: Nov 25, 2002
Inventors
Xian J. Ning
Keith Kwong Hon Wong
Assignees (at issue)
Infineon Technologies AG
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.