IP Library › Granted Patent US 6,750,462
Granted Patent Utility
US 6,750,462 · App. 10/280,057

Ion implanting method and apparatus

Inventors: Koji Iwasawa, Nobuo Nagai
Patented Case View Patent ↗
Granted: Jun 15, 2004 Filed: Oct 25, 2002
Inventors
Koji Iwasawa
Nobuo Nagai
Assignee (at issue)
NISSIN ELECTRIC CO., LTD.

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Quick Facts
Patent No.
US 6,750,462
App. No.
10/280,057
Filed
2002-10-25
Granted
2004-06-15
Kind
B2