Granted Patent
Utility
US 6,753,126 · App. 10/073,693
Polymer for chemically amplified resist and chemically amplified resist composition containing the same
Inventors:
Joohyeon Park, Dongchul Seo, Jongbum Lee, Hyunpyo Jeon, Seongju Kim
Patented Case
View Patent ↗
Granted: Jun 22, 2004
Filed: Feb 11, 2002
Inventors
Joohyeon Park
Dongchul Seo
Jongbum Lee
Hyunpyo Jeon
Seongju Kim
Assignee (at issue)
KOREA KUMHO PETROCHEMICAL CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.