Granted Patent
Utility
US 6,753,194 · App. 10/083,440
Surface contamination analyzer for semiconductor wafers, method used therein and process for fabricating semiconductor device
Inventors:
Takeo Ushiki, Keizo Yamada, Yohsuke Itagaki, Tohru Tsujide
Patented Case
View Patent ↗
Granted: Jun 22, 2004
Filed: Feb 26, 2002
Inventors
Takeo Ushiki
Keizo Yamada
Yohsuke Itagaki
Tohru Tsujide
Assignee (at issue)
Fab Solutions, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.