Granted Patent
Utility
US 6,753,954 · App. 09/729,695
Method and apparatus for detecting aberrations in a projection lens utilized for projection optics
Inventor:
J. Fung Chen
Patented Case
View Patent ↗
Granted: Jun 22, 2004
Filed: Dec 6, 2000
Inventor
J. Fung Chen
Assignee (at issue)
ASML Masktools B.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.