Granted Patent
Utility
US 6,754,062 · App. 10/085,571
Hybrid ceramic electrostatic clamp
Inventors:
Joseph S. Logan, John R. Miller, Mahmood Naim, Robert E. Tompkins
Patented Case
View Patent ↗
Granted: Jun 22, 2004
Filed: Feb 27, 2002
Inventors
Joseph S. Logan
John R. Miller
Mahmood Naim
Robert E. Tompkins
Assignee (at issue)
Praxair S.T. Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.