Granted Patent
Utility
US 6,755,934 · App. 09/950,748
Processing apparatus having particle counter and cleaning device, cleaning method, cleanliness diagnosis method and semiconductor fabricating apparatus using the same
Inventor:
Kenji Matsuoka
Patented Case
View Patent ↗
Granted: Jun 29, 2004
Filed: Sep 12, 2001
Inventor
Kenji Matsuoka
Assignee (at issue)
NEC Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.