IP Library › Granted Patent US 6,755,948
Granted Patent Utility
US 6,755,948 · App. 10/089,626

Titanium target for sputtering

Inventors: Hideaki Fukuyo, Yuichiro Shindo, Hideyuki Takahashi
Patented Case View Patent ↗
Granted: Jun 29, 2004 Filed: Apr 1, 2002
Inventors
Hideaki Fukuyo
Yuichiro Shindo
Hideyuki Takahashi
Assignee (at issue)
Nikko-Materials Co., Ltd.

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Quick Facts
Patent No.
US 6,755,948
App. No.
10/089,626
Filed
2002-04-01
Granted
2004-06-29
Kind
B1