Granted Patent
Utility
US 6,755,989 · App. 09/818,073
Aqueous cleaning composition containing copper-specific corrosion inhibitor for cleaning inorganic residues on semiconductor substrate
Inventors:
William A. Wojtczak, Ma. Fatima Seijo, David Bernhard, Long Nguyen
Patented Case
View Patent ↗
Granted: Jun 29, 2004
Filed: Mar 27, 2001
Inventors
William A. Wojtczak
Ma. Fatima Seijo
David Bernhard
Long Nguyen
Assignee (at issue)
ADVANCED TECHNOLOGY & MATERIALS CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.