Granted Patent
Utility
US 6,756,168 · App. 10/218,376
Determining exposure time of wafer photolithography process
Inventors:
Jiunn Yann Yu, Chi Jui Yeh, Kam-Tung Li
Patented Case
View Patent ↗
Granted: Jun 29, 2004
Filed: Aug 12, 2002
Inventors
Jiunn Yann Yu
Chi Jui Yeh
Kam-Tung Li
Assignee (at issue)
MOSEL VITELIC INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.