Granted Patent
Utility
US 6,756,311 · App. 09/733,070
Methods and apparatus for producing semiconductor devices
Inventor:
Koji Suzuki
Patented Case
View Patent ↗
Granted: Jun 29, 2004
Filed: Dec 11, 2000
Inventor
Koji Suzuki
Assignee (at issue)
Kawasaki Microelectronics, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.