Granted Patent
Utility
US 6,756,317 · App. 09/840,716
Method for making a microstructure by surface micromachining
Inventors:
Jeffry J. Sniegowski, M. Steven Rodgers
Patented Case
View Patent ↗
Granted: Jun 29, 2004
Filed: Apr 23, 2001
Inventors
Jeffry J. Sniegowski
M. Steven Rodgers
Assignee (at issue)
MEMX, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.