Granted Patent
Utility
US 6,756,318 · App. 09/954,244
Nanolayer thick film processing system and method
Inventors:
Tue Nguyen, Tai Dung Nguyen
Patented Case
View Patent ↗
Granted: Jun 29, 2004
Filed: Sep 10, 2001
Inventors
Tue Nguyen
Tai Dung Nguyen
Assignee (at issue)
TEGAL CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.